3D Temperature Measurement in IC Chips using Confocal Raman Spectroscopy
نویسندگان
چکیده
We have demonstrated the feasibility of depth and surface temperature measurements in active areas of semiconductor devices using confocal Raman spectroscopy. Using micro heaters, we created a 3D temperature profile across micron size volume. We determined the temperature profile with sub-micron resolution and obtained good agreement with calculations. Theoretical uncertainty in temperature determination has been discussed and generalized for 3D measurements.
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